A review of micromirror arrays

A Review: MICROMIRROR

Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems.Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applicati...

MEMS WDM Routers Using Analog Micromirror Arrays

There have been increasing interests in programmable optical add-drop multiplexers (OADM) and wavelength-selective switches in wavelength-division-multiplexed (WDM) networks. Conventional OADM has one input and one output channels, in addition to an add and a drop channels [l]. It is also called 1x1 OADM. Dynamic OADM with more than one output ports offers greater flexibility and functionality ...

SOI-CMOS-MEMS Electrothermal Micromirror Arrays

Micromirror arrays to assess luminescent nano-objects.

We propose an array of submicrometer mirrors to assess luminescent nano-objects. Micromirror arrays (MMAs) are fabricated on Si (001) wafers via selectively doping Ga using the focused ion beam technique to form p-type etch stop regions, subsequent anisotropic chemical etching, and Al deposition. MMAs provide two benefits: reflection of luminescence from nano-objects within MMAs toward the Si (...

High-resolution Wavefront Control Using Micromirror Arrays

Silicon deformable mirrors have the potential to modulate spatial and temporal features of an optical wavefront. This capability is critical for systems in which aberrations affect optical beam quality, including many applications in laser communication, medical imaging, astronomy, and target tracking. The main goal of the work presented here was to design, build, and test a 1024 actuator wavef...